LithoDreamer: physics-informed world model for computational lithography

Arxiv CS.AI (top papers)

Proposes a physics-informed world model for multi-stage computational lithography in semiconductor manufacturing. The model integrates mask optimization, optical imaging, and resist development into a unified framework.

lithographycomputational-lithography

Arxiv CS.AI (top papers)·Yuqi JiangYumeng LiuZimu LiJinyuan DengQian JinYucheng CuiYu LiXunzhao YinQi SunCheng Zhuo

22 hours ago